سال انتشار: ۱۳۹۱

محل انتشار: بیستمین کنفرانس مهندسی برق ایران

تعداد صفحات: ۵

نویسنده(ها):

M. Mansuri – Department of Electrical Engineering, Najafabad Branch, Islamic Azad University, Najafabad, Iran
M Ebnali-Heidari – Faculty of Engineering, University of Shahrekord, Shahrekord 8818634141, Iran
S Mokhtarian – Department of mechanical engineering, Isfahan University of technology, Isfahan, Iran
M. K. Moravvej-Farshi – Facultyof Electrical and Computer Engineering, Advanced Devices Simulation Lab

چکیده:

In this paper, we present a new method for designing an optofluidic interferometric sensor to measure the pressure and flow rate based on generated optical ring pattern. Thissensor consists of a flexible air gap optical cavity whose curvature depends on the pressure. When illuminated by amonochromatic light, the curved surface generates the interference patterns. In our numerical simulations, we take the effects of fluid flow rate, solid deformation, and the lightinterference into account. We use the beam propagation method (BPM) for simulating the optics and the finite element method(FEM) for simulating the mechanics. This pressure sensor was demonstrated in the working range of 0–۶۰Pa at the constant temperature of 20 C.