سال انتشار: ۱۳۹۱

محل انتشار: بیستمین کنفرانس سالانه مهندسی مکانیک

تعداد صفحات: ۴

نویسنده(ها):

Seyed Masoud Sotoodeh Bahraini – School of Mechanical Eng., Shiraz University, Shiraz, Iran
Mohammad Eghtesad – School of Mechanical Eng., Shiraz University, Shiraz
Mehrdad Farid – School of Mechanical Eng., Shiraz University, Shiraz
Esmaeal Ghavanloo – School of Mechanical Eng., Shiraz University, Shiraz,

چکیده:

The MEMS structures usually are made from silicon, consideration of the viscoelastic effect in microbeams duo to the phenomena of silicon creep is necessary. Quasi-static response of an electrically actuated viscoelastic microbeam is presented in this paper. For this purpose, a nonlinear finite element formulation of viscoelastic beams using fractional derivative constitutive equations has been developed. The four-parameter fractional derivative model has been used to describe the constitutive equation. The electric force acting on the microbeam is defined. A method for solving the nonlinear algebraic equation is described. The deflected configuration for a microbeam with different purely DC voltage is presented. According to authors knowledge, it is the first time that fractional viscoelastic model is used to find the quasi-static response of a viscoelastic microbeams